Aspheric surface measurement method, non-spherical surface measuring device and an optical element processing equipment

摘要

PROBLEM TO BE SOLVED: To calibrate an error of an optical system and highly accurately measure a shape of a measured surface.;SOLUTION: The aspherical surface measurement method guides light reflected on a measured surface having an aspherical surface to a light reception sensor via the optical system. The method comprises: calculating a position magnification distribution and an angle magnification distribution between the light reception sensor and a sensor conjugate surface; measuring a first wave front on the light reception sensor of reflection light on a reference surface using a sensor output; calculating a second wave front of light on the light reception sensor reflected on the reference surface using a parameter of the optical system; changing the parameter of the optical system such that a difference of a rotation symmetry component between the first and second wave fronts becomes small; and calculating a shape of the measured surface using a position magnification distribution or an angle magnification distribution on the sensor conjugate surface calculated by use of a changed parameter, a measurement value of an angle distribution of a light beam respectively reflected on the reference surface and measured surface, and a shape of the reference surface.;COPYRIGHT: (C)2013,JPO&INPIT