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Interferometric simultaneous measurement of the topography and refractive index of the surface of an object by measuring the spatial phase distributions from both transmission and reflection interferograms
Interferometric simultaneous measurement of the topography and refractive index of the surface of an object by measuring the spatial phase distributions from both transmission and reflection interferograms
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机译:通过测量透射和反射干涉图的空间相位分布,同时测量物体表面的形貌和折射率的干涉测量
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摘要
Interferometry method for determining the topography and refractive index distribution of the surface of an object (3) has the following steps: simultaneous measurement of a transmission interferogram and reflection interferogram, reconstruction of spatial phase distributions from both the transmission and reflection interferograms and determination of the topography and refractive index distribution for the object from the two phase distributions. An independent claim is made for an interferometer for determining the topography and refractive index distribution of the surface of an object.
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