Ions measuring device, has collector electrode and secondary electrons multiplier that are used as detectors, and deflecting unit deflecting ions or secondary particles e.g. electrons, in absorber or multiplier

摘要

The device has a collector electrode (17) e.g. Faraday cup, and a secondary electrons multiplier (18) are used as detectors. A deflecting unit (14) deflects ions or secondary particles e.g. electrons, in the electrode or multiplier. The unit has a conversion dynode (15), such that the electrons from the unit are acquired in the multiplier. The unit has a deflector electrode (16) arranged between the dynode and multiplier.