首页> 外国专利> Device for removing a substrate from a treatment chamber filled with a treating liquid used in galvanic surface treatment comprises a unit for producing relative movement between the substrate and liquid meniscus

Device for removing a substrate from a treatment chamber filled with a treating liquid used in galvanic surface treatment comprises a unit for producing relative movement between the substrate and liquid meniscus

机译:用于从填充有用于电表面处理的处理液的处理室中去除基板的设备包括用于在基板和液体弯月面之间产生相对运动的单元

摘要

Device for removing a substrate from a treatment chamber filled with a treating liquid comprises a unit for producing relative movement between the substrate and liquid meniscus so that the excess treating liquid adhered to the substrate is minimized after the substrate leaves the chamber. Preferred Features: The relative movement is produced by a unit for lifting the substrate from the chamber, a unit for bleeding or pumping out the treating liquid, a unit for lowering the chamber relative to the substrate or a combination of these units.
机译:用于从填充有处理液的处理室中去除基板的装置包括用于在基板和液体弯月面之间产生相对运动的单元,使得在基板离开腔室之后,附着到基板的过量处理液被最小化。优选的特征:相对运动是由用于从腔室中抬起衬底的单元,用于渗出或泵出处理液的单元,用于相对于衬底降低腔室的单元或这些单元的组合产生的。

著录项

  • 公开/公告号DE202006000367U1

    专利类型

  • 公开/公告日2006-03-16

    原文格式PDF

  • 申请/专利权人 ENTHONE INC. WEST HAVEN;

    申请/专利号DE20062000367U

  • 发明设计人

    申请日2006-01-10

  • 分类号B05C3/02;

  • 国家 DE

  • 入库时间 2022-08-21 21:19:50

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