process for the production of a multifunctional mehrlagen layer on a transparent kunststoffsubstrat and then produced multifunctional mehrlagenschicht

摘要

The invention relates to a process for producing a multifunctional multi-ply layer on a transparent plastic substrate and to a multifunctional multi-ply layer produced thereby. In the process, a multi-ply layer is constructed by a plasma-assisted method on a transparent plastics substrate (1) in an enclosed process by using a microwave plasma source to produce a plasma and continuously maintaining the plasma during the course of the process. A first adhesion-promoting organosilicon polymer layer (2) is subsequently deposited in the microwave plasma, and then cathode sputtering is used to deposit a first ITO layer (3), and a transparent layer of metal and/or of metal oxide and a second ITO layer (3). Finally, an organosilicon polymer layer (5) is deposited. The multifunctional multi-ply layer is composed of a first adhesion-promoting organosilicon polymer layer (2) with a thickness of from 50 to 300 nm, of a first ITO layer (3) with a thickness of from 50 from 300 nm, of at least one transparent layer with a thickness of from 10 to 30 nm of metal and/or of metal oxide, of a second ITO layer (3) with a thickness of from 50 to 300 nm, and of at least one final organosilicon polymer layer (5) with a thickness of from 300 nm to 6 000 nm.