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process for the production of highly sensitive, capacitive, and resonierenden integrated sensors, in particular accelerometers and gyroscopes, and thus manufactured sensors
process for the production of highly sensitive, capacitive, and resonierenden integrated sensors, in particular accelerometers and gyroscopes, and thus manufactured sensors
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机译:高灵敏度,电容性和谐振性集成传感器(特别是加速度计和陀螺仪)的生产方法,从而制造出传感器
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摘要
To increase the sensitivity of the sensor the suspended structure (40) forming the seismic mass has a tungsten core (26) which has high density. To manufacture it, a sacrificial layer (21) of silicon oxide, a polycrystal silicon layer (24), a tungsten layer (26) and a silicon carbide layer (28) are deposited in succession over a single crystal silicon body (1); the suspended structure (40) is defined by selectively removing the silicon carbide (28), tungsten (26) and polycrystal silicon (24) layers; spacers (30') of silicon carbide are formed which cover the uncovered ends of the tungsten layer (26); and the sacrificial layer (21) is then removed. IMAGE
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