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storage and distribution system for aussigkeiten

机译:澳西格丁的储藏和配送系统

摘要

A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g. including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.
机译:流体存储和分配系统(10),包括用于将流体(17)保持在所需压力下的容器(12)。该容器具有设定为预定压力的压力调节器(26)。调节器可以在内部或外部定位,单级或多级,并且与容器的端口相关联。分配组件,例如包括流量控制装置,例如阀(20)的气体/蒸气流与调节器(26)连通,由此阀的打开实现了来自容器(12)的气体/蒸气的分配。容器中的流体可以由一种液体构成,该液体被限制在容器中,该压力超过了在当时的温度条件下的液化压力,例如在室温下。环境(室温)温度。

著录项

  • 公开/公告号DE69927461D1

    专利类型

  • 公开/公告日2006-02-09

    原文格式PDF

  • 申请/专利权人 ADVANCED TECHNOLOGY MATERIALS INC.;

    申请/专利号DE19996027461T

  • 发明设计人 WANG LUPING;TOM GLENN;

    申请日1999-04-28

  • 分类号C23C14/24;C23C16/448;F17C1;F17C7;F17C7/02;F17C7/04;F17C9/02;F17C11;F17C13;F17C13/02;F17C13/04;H01L21/205;H01L21/265;H01L21/306;

  • 国家 DE

  • 入库时间 2022-08-21 21:17:47

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