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Brief description of embodiments of an electronic component integrated and electrical device incorporating a component integrated thus obtained.

机译:对由此获得的集成有电子部件的电子部件集成和电气设备的实施例的简要说明。

摘要

A process for the production of an electronic component comprises the covering of a substrate (100) by a portion (p), delimiting with the substrate a volume (v) at least partially filled with a temporary material, the removal of the temporary material by a chimney (c) for access to said volume, and the deposition of a filling material (7) in said volume from precursors brought by the chimney. The process is particularly adapted for the production of a grid of a mos type transistor. In this case, the filling material is conductive, and an electrically insulating material of the coating (8) can also be deposited in said volume before the filling material is conductive.
机译:电子元件的生产方法包括用部分(p)覆盖衬底(100),用部分(p)限定至少部分填充有临时材料的体积(v),通过以下方法去除临时材料用于进入所述容积的烟囱(c),以及由烟囱带来的前体在所述容积中沉积填充材料(7)。该方法特别适合于生产mos型晶体管的栅极。在这种情况下,填充材料是导电的,并且在填充材料导电之前,涂层(8)的电绝缘材料也可以沉积在所述体积中。

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