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THERMAL PROJECTION DEVELOPING METHOD OF TARGET BASED ON SILICON AND ZIRCONIUM

机译:基于硅和锆的目标热投影发展方法

摘要

A process for producing a target by a thermal projection, in particular by the plasma route, said target comprising at least one compound based on atoms of different types chosen in particular from the constituents M belonging to the family (Zr, Mo, Ti, Nb, Ta, Hf, Cr) and silicon, characterized in that at least a fraction of said compound whose constituents are bonded by covalent and / or ionic and / or metallic bonds in a plasma propellant, said plasma thruster projecting the constituents of said compound on the target so as to obtain a deposit of said compound at a surface portion of said target.
机译:一种通过热投射,特别是通过等离子途径生产靶的方法,所述靶包含至少一种基于不同类型原子的化合物,所述化合物特别选自选自族(Zr,Mo,Ti,Nb)的成分M ,Ta,Hf,Cr)和硅,其特征在于,至少一部分所述化合物的成分通过等离子推进剂中的共价键和/或离子和/或金属键结合,所述等离子推进器将所述化合物的成分投射到在靶的表面部分获得所述化合物的沉积物。

著录项

  • 公开/公告号FR2881757A1

    专利类型

  • 公开/公告日2006-08-11

    原文格式PDF

  • 申请/专利权人 SAINT-GOBAIN GLASS FRANCE;

    申请/专利号FR20050050358

  • 发明设计人 NICOLAS NADAUD;DOMINIQUE BILLIERES;

    申请日2005-02-08

  • 分类号C23C14/35;C23C14/04;

  • 国家 FR

  • 入库时间 2022-08-21 21:17:14

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