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HIGHLY SENSITIVE CAPACITIVE TRANSDUCER (MICRO-MACHINING) ULTRASONIC MICRO-FACTORY

机译:高灵敏度电容式传感器(微加工)超声微工厂

摘要

A capacitive ultrasonic micromachining transducer (cMUT) comprising a lower electrode (12). In addition, the cMUT comprises a diaphragm (16) disposed in the immediate vicinity of the lower electrode (12) so that an interval having a first gap width is formed between the diaphragm (16) and the lower electrode ( 12). Alternatively, the cMUT has at least one member formed in the gap, while the at least one member is adapted to provide a second gap width between the diaphragm (16) and the lower electrode (12). .
机译:包括下部电极(12)的电容式超声微加工换能器(cMUT)。另外,cMUT包括设置在下部电极(12)的紧邻附近的隔膜(16),从而在隔膜(16)和下部电极(12)之间形成具有第一间隙宽度的间隔。备选地,cMUT具有在间隙中形成的至少一个构件,而该至少一个构件适于在隔膜(16)和下部电极(12)之间提供第二间隙宽度。 。

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