WASHING METHOD USING SULFURIC ACID HYDROGENPEROXIDE WASHING SOLUTION, MANUFACTURING METHOD OF ELECTRO-OPTICAL PANEL AND SULFURIC ACID HYDROGENPEROXIDE WASHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a washing method due to a sulfuric acid hydrogen peroxide washing solution constituted so as not only to certainly keep a washing capacity but also to achieve long life by a simple method and a simple constitution, and also to provide a manufacturing method of an electro-optical panel and a sulfuric acid hydrogenperoxide washing apparatus.;SOLUTION: The washing method using the sulfuric acid hydrogenperoxide washing solution 9 containing sulfuric acid and hydrogen peroxide has a washing process for immersing a substrate for the electro-optical panel in the sulfuric acid hydrogenperoxide washing solution 9 to wash the same, a concentration detection process for detecting the concentrations of sulfuric acid, hydrogen peroxide and water in the sulfuric acid hydrogenperoxide washing solution 9 and a supply process for supplying hydrogen peroxide and sulfuric acid to the sulfuric acid hydrogenperoxide washing solution 9 so that the concentrations of sulfuric acid, hydrogen peroxide and water are respectively received within predetermined ranges. The concentration of Caro's acid in the sulfuric acid hydrogenperoxide washing solution 9 is held to a predetermined range.;COPYRIGHT: (C)2008,JPO&INPIT