ACCELERATION/ANGULAR VELOCITY DETECTING ELEMENT AND MANUFACTURING METHOD THEREFOR, AND ACCELERATION/ANGULAR VELOCITY MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a triaxial acceleration and triaxial angular velocity detecting element of small size and reduced dispersion, and to provide a manufacturing method therefor.;SOLUTION: This acceleration/angular velocity detecting element 1 has piled-up type structure, capable of forming by piling up sequentially a base 2, a base-side electrode 7, the sacrificial layer 8 (not shown), a weight-side electrode 6, a support beam 5, a sheet-like member 4 and a weight 3, via the sacrificial layer 8 in between the base 2 and the mounted body 3. Since the manufacturing process is simplified, because a casing or a frame body is not provided for supporting the weight 3, as in conventional structures, an acceleration/angular velocity detecting element of small size and reduced dispersion can be obtained.;COPYRIGHT: (C)2008,JPO&INPIT