POLISHING FLUID FOR POLISHING ORGANIC FILM, AND METHOD FOR POLISHING ORGANIC FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a polishing fluid for polishing an organic film, which polishing fluid can efficiently eliminate a film thickness difference while keeping a polishing speed, and can make the film thickness of a colored layer uniform in a pixel, and is suitable for polishing a color filter for a liquid crystal display, and further to provide a method for polishing the film made of an organic material (organic film) using the same polishing fluid.;SOLUTION: The polishing fluid for polishing the organic film contains abrasive grains, water-soluble polymers, and water, and the ζ-potential of the abrasive grains in the polishing fluid is positive. The organic film is polished by pressing a base plate, which has the organic film to be polished thereon, against the polishing cloth on a polishing surface plate, and by relatively moving the base plate and the polishing surface plate while supplying the polishing fluid between the organic film and the polishing cloth.;COPYRIGHT: (C)2007,JPO&INPIT