POLISHING LIQUID FOR POLISHING ORGANIC FILM AND METHOD FOR POLISHING ORGANIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a polishing liquid for polishing an organic film suitable for polishing the organic film, etc., for liquid crystal displays at a high polishing speed and affording uniform film thickness in the plane of the film to be polished.;SOLUTION: The polishing liquid for polishing the organic film comprises abrasive grains, a nonionic water-soluble polymer, an anionic water-soluble polymer and water. A method for polishing the organic film is carried out as follows. A substrate having the organic film to be polished formed thereon is pressed against a polishing cloth of a polishing platen and pressurized. The substrate and the polishing platen are relatively moved while feeding the polishing liquid for polishing the organic film described in any of claims 1 to 8 between the organic film and the polishing cloth. Thereby, the organic film is polished.;COPYRIGHT: (C)2007,JPO&INPIT