OBSERVATION DEVICE AND OBSERVATION METHOD OF LIGHT INTENSITY DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To provide an observation device capable of observing with high accuracy a light intensity distribution generated in an actual system, by using a light having a wavelength different from the actual system and a light modulation element of the same surface irregular type as the actual system.;SOLUTION: This observation device has a constitution, wherein the light intensity distribution generated by the light modulation element of the surface irregular type and a transmission type and an imaging optical system, in a prescribed optical device, is observed. The observation device is equipped with an illumination optical system 18 for observation for reflectively illuminating the irregular surface of the light modulation element (MD) with a light of a wavelength λs, which is different from the wavelength λr of light used in the prescribed optical device, and the imaging optical system 19 for observation for imaging light from the light modulation element illuminated, reflectively.;COPYRIGHT: (C)2008,JPO&INPIT