OBSERVATION DEVICE WITH ILLUMINATING LIGHT INTENSITY DISTRIBUTION MEASUREMENT FUNCTION AND ILLUMINATING LIGHT INTENSITY DISTRIBUTION MEASUREMENT METHOD FOR OBSERVATION DEVICE AND ILLUMINATING LIGHT ILLUMINATION METHOD FOR OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an observation device with illuminating light intensity distribution measurement function capable of measuring two-dimensional illuminating light intensity distribution on an observation surface in a real time without fluctuating an observation environment during the observation of an observation object such as a sample, and an illuminating light intensity distribution measurement method of an observation device.;SOLUTION: The observation device includes: an illuminating light source 10; an array-shaped detector 11 to be arranged on an observation surface 16 only in intensity distribution measurement at a point of time of the initial state of an illuminating light; and an array-shaped detector 12 arranged on an optical path branched from a predetermined position between the light source 10 on an illumination optical path and a lens 15 at the side of the light source 10 arranged at the position nearest to the observation surface 16. The observation device also includes an arithmetic processing unit 13 for calculating illuminating light intensity distribution on the observation surface 16 at an arbitrary point of time by using illuminating light intensity distribution on the observation surface 16 at a point of time of an initial state measured by the detector 11 and the illuminating light intensity distribution at the arrangement position of the detector 12 from the point of time of the initial state to the current point of time measured by the detector 12.;COPYRIGHT: (C)2013,JPO&INPIT