METHOD OF MANUFACTURING MICROPROBE GUIDE, MICROPROBE UNIT USING MICROPROBE GUIDE, AND STAGGERED TYPE MICROPROBE UNIT

摘要

PPROBLEM TO BE SOLVED: To guide a probe highly accurately, and to narrow a pitch of tip arrangement of each probe, in a probe unit. PSOLUTION: A staggered type microprobe unit 40 is constituted by combining back to back an upper side microprobe unit 42 and a lower side microprobe unit 44. The upper side microprobe unit 42 is constituted of a microprobe guide 70 having a plurality of grooves 72, and microprobes 50 arranged respectively on each groove 72. The lower side microprobe unit 44 has a similar configuration. The microprobe guides 70, 71 having the plurality of grooves 72 are acquired by forming each elongate deep groove having the groove depth and the groove width corresponding to the height and the width of a shaft part of the microprobes 50, 51 by using an anisotropic dry etching method to a silicon plate. PCOPYRIGHT: (C)2008,JPO&INPIT