A manufacturing method of a microprobe guide, a microprobe unit using the same, and a zigzag arrangement type microprobe unit are provided to accurately guide the microprobe by forming a depressed part or an aperture at a part of the bottom of a microprobe guide groove. A zigzag arrangement type microprobe unit has two microprobe units(42,44). A microprobe(50) is arranged in a groove formed in a microprobe guide(70) of the upper microprobe unit(42). A microprobe(51) is arranged in a groove formed in a microprobe guide(71) of the lower microprobe unit(44). One ends of the microprobes(50,51) are extended so as to be inclined to an axial unit, and the other ends thereof are extended so as to be inclined in the opposite direction to the inclination of one ends. The upper and lower microprobe units(42,44) are positioned to arrange tips of the adjacent microprobes(50,51) in a zigzag form.
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