SCANNING PROBE MICROSCOPE AND METHOD FOR ACQUIRING IMAGE REFLECTING PHYSICAL PROPERTY VALUE OF SPECIMEN

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope for acquiring, in a short time, a plurality of images which reflect the physical property values of a sample unaffected by temperature drift.;SOLUTION: In first acquiring an image reflecting the physical property values of the sample, a probe 21 is scanned two-dimensionally by an XYZ scanner 12, to acquire three-dimensional information on the specimen S. A probe scanning track is calculated by a calculation part 25, based on the direction of the two-dimensional scanning and on the three-dimensional information. The calculated scanning track is stored in a memory 27, and the probe 21 is scanned along the scanning track by the XYZ scanner 12, to acquire an image reflecting the physical property values of the sample; and in acquiring an image that reflects the physical property values of the specimen thereafter, the probe 21 is scanned by the XYZ scanner 12, along the scanning track stored in the memory 27 to acquire an image reflecting the physical property values of the sample S.;COPYRIGHT: (C)2008,JPO&INPIT