PRODUCTION METHOD FOR COMPOSITE OXIDE FILM, COMPOSITE BODY OBTAINED BY THE PRODUCTION METHOD, DIELECTRIC MATERIAL AND PIEZOELECTRIC MATERIAL COMPRISING THE COMPOSITE MATERIAL, CAPACITOR, PIEZOELECTRIC ELEMENT, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a production method for a composite oxide film having a high dielectric constant and whose film thickness can be optionally controlled without using complicated and large-scale equipment, to provide a composite body having the composite oxide film on the surface of a substrate, to provide a dielectric material or a piezoelectric material comprising the composite body, to provide a capacitor or a piezoelectric element comprising these materials, and to provide electronic apparatus provided with these elements.;SOLUTION: An oxide film on the surface of a substrate comprising a first metal element is removed, next, the substrate from which the oxide film is removed is brought into reaction with a solution comprising a basic compound to become into a gas by at least one means selected from evaporation, sublimation and thermal decomposition under the atmospheric pressure or reduced pressure and the ions of a second metal element, so as to obtain a composite oxide film comprising the first metal element and the second metal element on the surface of the substrate.;COPYRIGHT: (C)2008,JPO&INPIT