Its manufacturing method, a dielectric material comprising a composite oxide film, a piezoelectric material, a capacitor, an electronic device and the piezoelectric element and the composite oxide film

摘要

By forming a complex oxide film by a wet process on the substrate surface is washed with an acid solution of pH5 follow this complex oxide film, the present invention, the ratio with reduced carbonate complex oxide film a method for producing the same and complex oxide film having a high dielectric constant. Furthermore, there is provided a capacitor containing the material, the electronic device including an element of the piezoelectric element and these piezoelectric material dielectric material and including a complex oxide film of the present invention, and.