COMPLEX OXIDE FILM AND METHOD FOR PRODUCING SAME, COMPOSITE BODY AND METHOD FOR PRODUCING SAME, DIELECTRIC MATERIAL, PIEZOELECTRIC MATERIAL, CAPACITOR, PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE

摘要

The present invention is intended to provide a kind of complex oxide film relative dielectric constant with higher and high-tension resistive, whose film thickness can be controlled arbitrarily, and its manufacturing method, the complex comprising the complex oxide film and its manufacturing method, dielectric or piezoelectric material or the complex comprising the complex oxide film, capacitor or piezoelectric element include that composite oxide film is advantageous, to improve proof voltage, with a kind of electronic equipment with the device, without regard to any complicated or large scale equipment. The complex oxide film can be obtained containing titanium elements on substrate surface by formation metal oxide film, then allow solution containing strontium ion with oxidation film. It includes it as piezoelectric material generation that capacitor, which includes composite oxide film as dielectric material and piezoelectric element,.