WAFER-TYPE TEMPERATURE SENSOR, TEMPERATURE MEASURING DEVICE, THERMAL TREATMENT APPARATUS AND TEMPERATURE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a wafer type temperature sensor where the measuring process of temperature can be automated and the accuracy of measurement will not degrade, even at a high temperature.;SOLUTION: The wafer-type temperature sensor 11 comprises a wafer 12, a plurality of temperature sensors 13a, 13b, ... (hereinafter, to be generically called "sensor 13") for dividing the area on the wafer 12 into a plurality of regions which are arranged at partitioned each regions X, Y, ..., and detect the temperature on the wafer 12, and a contact 15, which outputs the sensor output of each of the plurality of the temperature sensors 13 as an output signal.;COPYRIGHT: (C)2007,JPO&INPIT