WAFER-TYPE TEMPERATURE SENSOR, TEMPERATURE MEASURING APPARATUS USING THE SAME, HEAT TREATMENT APPARATUS HAVING TEMPERATURE-MEASURING FUNCTION, AND TEMPERATURE-MEASURING METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a wafer-type temperature sensor capable of eliminating the need for A/D converter, adapted to automation, enhancing resistance to heat, and measuring the temperature distribution of a wafer. PSOLUTION: The wafer-type temperature sensor 10 is provided with the wafer 1 and a plurality of temperature sensors 2a, 2b, ..., each being with the upper surface of the wafer 1 partitioned into a plurality of regions. The temperature sensors 2a, 2b, ... are each provided with an oscillation circuit for generating frequency signals, based on the temperature of a corresponding region within a frequency band that is different region by region, in response to the input of the supply voltage. PCOPYRIGHT: (C)2007,JPO&INPIT