PROBLEM TO BE SOLVED: To eliminate any error based on introduction reproducibility of an object into an apparatus at a conveyance destination while simplifying the construction of the apparatus of the conveyance destination of the object.;SOLUTION: An object conveying apparatus comprises a first base member WLB, and a conveying member 143 supported on the first base member WLB for holding and conveying the object W to a predetermined delivery position P4. In order to measure part of a periphery of the object W located at the delivery position P4 in cooperation with detection devices S1, S2, S3 supported on a second base member (MCL) separated in vibration transmission from the first base member WLB, illumination apparatuses EL1, EL2, EL3 are provided on the conveying member 143 for illuminating the part of the periphery.;COPYRIGHT: (C)2007,JPO&INPIT
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