INSPECTION METHOD, INSPECTION DEVICE, EVALUATION METHOD AND EVALUATION DEVICE OF SEMICONDUCTOR SUBSTRATE

摘要

PPROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor substrate capable of detecting defects of a semiconductor substrate at high efficiency. PSOLUTION: The inspection device comprises an illumination part which radiates excitation light to a semiconductor substrate, a detector for detecting emission of photoluminescence under irradiation of the excitation light, and a data processor which processes the emission data detected by the detector to detect defects of the semiconductor substrate. It radiates the emission light until the time variation rate in intensity of the emission substantially becomes constant to detect the emission, resulting in detection of defects. PCOPYRIGHT: (C)2008,JPO&INPIT