INSPECTION DEVICE FOR PERFORMANCE EVALUATION OF INSPECTION EQUIPMENT, PERFORMANCE EVALUATION PROGRAM FOR INSPECTION EQUIPMENT, PERFORMANCE EVALUATION METHOD OF INSPECTION EQUIPMENT, AND PERFORMANCE EVALUATION DEVICE FOR INSPECTION EQUIPMENT

摘要

To provide inspection devices capable of properly evaluating in-plane uniformity of an inspection device, performance between inspection devices, and performance between inspection facilities.SOLUTION: Provided is an inspection device having multiple wells, in which a reagent composition containing an amplifiable reagent having a particular molecular number is disposed in the multiple wells, the amplifiable reagent, which is disposed in the multiple wells, consisting of two or more groups in which the particular molecular number is different from one another.SELECTED DRAWING: Figure 1