HIGH-THERMAL CONDUCTIVE SILICON NITRIDE CERAMIC HAVING HIGH RELIABILITY AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high-thermal heat conductive silicon nitride ceramic, a method of manufacturing the same and applied products of the same.;SOLUTION: The high-thermal conductive silicon nitride ceramic is provided which is a reaction-sintered silicon nitride sintered compact and is characterized in that it contains a β-phase silicon nitride as a principal component, contains 0.5-7 mol% at least one kind of Y, Yb, Nd and Sm expressed in terms of oxide and an abundance of Mg of 2 mol% expressed in terms of oxide, and in that it has a heat conductivity of ≥100 W/mK, a 3-point bending strength of ≥600 MPa and has a fracture toughness of ≥7 MPam^1/2 measured by a single-edge-precracked beam method. The method of manufacturing the same and the applied products are provided. By this way, various Si raw material powder including low grade Si raw material is used as a starting raw material and the silicon nitride having excellent characteristics is synthesized inexpensively.;COPYRIGHT: (C)2007,JPO&INPIT