PERFORMANCE TEST METHOD FOR PRESSURE REGULATING VALVE IN GAS SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a performance test method for a pressure regulating valve, capable of efficiently and early performing performance decision related to pressure control in a gas supply device.;SOLUTION: In a first step, a purge gas is sealed in a gas supply line 1 from a gas cylinder 2 to a gate valve 5 after replacement of the gas cylinder 2, it is left for a prescribed time, and it is decided whether or not a pressure change amount calculated on the basis of output from a temperature sensor 11 and a first pressure sensor 9 installed inside a route thereof at the time of a leaving start and at the time of leaving completion is not more than a prescribed value. In a succeeding second step, the purge gas sealed in the first step is sealed in the gas supply line 1 from the gas cylinder 2 to a gas supply valve 7, it is left for a prescribed time, and it is decided whether or not a pressure change amount calculated on the basis of output from the temperature sensor 11 and a second pressure sensor 10 installed downstream of the pressure regulating valve 6 within the route at the time of a leaving start and at the time of leaving completion is not more than a prescribed value.;COPYRIGHT: (C)2007,JPO&INPIT