MEASURING PROBE, MEASURING INSTRUMENT OF SURFACE CHARACTERISTICS, AND MEASURING METHOD OF SURFACE CHARACTERISTICS

摘要

PROBLEM TO BE SOLVED: To provide a measuring probe capable of continuously an extremely fine region of a nanometer order while minimizing a contact state or a measuring position error without separating probes from a sample each time when measurement in a depth direction is performed with respect to the sample, a measuring instrument of surface characteristics and a measuring method of surface characteristics.;SOLUTION: A scanning probe microscope (the measuring instrument of surface characteristics) 1 is equipped with the measuring probe 10 which has an arrangement of a probe 8 having one set of a pair of voltage applying probes 3A and 3B for applying voltage to the sample 2 to be measured, a pair of measuring probes 5A and 5B arranged so as to measure the voltage drop caused in the sample 2 by the application of voltage, a pair of second measuring probes 6A and 6B and a pair of third measuring probes 7A and 7B.;COPYRIGHT: (C)2007,JPO&INPIT