CHARGE PLATE, CDM SIMULATOR AND TESTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device capable of correctly reproducing an electric discharge model which has been conventionally difficult to reproduce.;SOLUTION: A charge plate 20 for charging a device (IC) to be tested 10 includes a first semiconducting substrate (highly resistant substrate) 22 with a relatively large resistance value and a substrate 21 with a predetermined dielectric constant. A ground plate 61 for discharging the charged device 10 includes a relatively highly resistant member 63, and further includes an additional ground plate 62.;COPYRIGHT: (C)2007,JPO&INPIT