In the production manner of the hot single electron pair tunnel component which uses the stratified oxide

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-temperature single electron pair tunnel element using a layered oxide superconducting material which is provided with a tunnel junction layer of sub-micron square order or smaller and can operate at a temperature equal to that of liquid helium (4.2 K) or higher. ;SOLUTION: A method for manufacturing a high-temperature single electron pair tunnel element using a layered oxide superconducting material having a laminated crystal structure composed of an electric conductive layer and a tunnel barrier layer includes a step of fixing the acicular single crystal 1 of the layered oxide superconducting material to the holder of a focused ion beam device, a step of forming a first narrow groove 3 having a length in the x-direction, a width in the y-direction, and a depth which is equal to or deeper than the half of the thickness of the single crystal 1 in the z-direction at a prescribed position on one surface of the crystal 1 with an ion beam, a step of fixing the worked single crystal 1 with silver paste, a step of forming a second narrow groove 2 having the same length, width, and depth as the first narrow groove 1 has on a parallel line, and a step of removing unnecessary portions left.;COPYRIGHT: (C)2000,JPO