ZINC OXIDE OPTICAL DEVICE, METHOD OF UTILIZING ZINC OXIDE OPTICAL DEVICE AND ZINC OXIDE SEMICONDUCTOR LASER

摘要

PROBLEM TO BE SOLVED: To provide a method for easily forming a pn junction between a silicon substrate and a zinc oxide thin film at a low cost.;SOLUTION: In the zinc oxide optical device comprising a p type silicon substrate 1 provided with a conductive thin film 2 on one surface, an n type zinc oxide thin film 3 for which the pn junction is formed with the other surface of the p type silicon substrate 2 and a first light transmissive conductive thin film 4 formed on the other surface of the n type zinc oxide thin film 3, by laminating zinc oxide on the surface of the p type silicon substrate 1 by a laser ablation technique and annealing it thereafter, the pn junction is formed between the p type silicon substrate 1 and the n type zinc oxide thin film 3.;COPYRIGHT: (C)2007,JPO&INPIT