One somatotype piezoelectricity which is superior in endurance/the electrostrictive film die component and its production mannered

摘要

PROBLEM TO BE SOLVED: To provide an integrated piezoelectric/electrostrictive film type element exhibiting excellent durability in which the material of a substrate is not deteriorated nor the characteristics of a piezoelectric/electrostrictive layer are deteriorated even if the element is used under a high temperature high humidity atmosphere. SOLUTION: On a ceramic substrate principally comprising totally or partially stabilized zirconium oxide, a piezoelectric/electrostrictive operating part comprising a lower electrode, a piezoelectric/electrostrictive layer having a composition containing a lead element, and an upper electrode is formed integrally. Occurrence rate of different phase on the surface of the piezoelectric/electrostrictive layer is regulated in the range of 0.1-30% after a film is formed.