BINARY SINE SUB WAVELENGTH GRATING AS ALIGNMENT MARK

摘要

PROBLEM TO BE SOLVED: To apply a two-dimensional photonic crystal to an alignment device.;SOLUTION: An alignment mark for use on a substrate has a structure of a periodical two-dimensional array. An interval between lines of the array of the structure is smaller than the size of an alignment radiation beam, but larger than an exposure beam, and width of the lines is sinusoidally changed from one end to the other end of the array.;COPYRIGHT: (C)2007,JPO&INPIT