It is installed on the mount section of electrostatic chuck support feature and the support

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck supporting mechanism to and from which an electrostatic chuck plate 32 is easily attached and detached.;SOLUTION: By locking the electrostatic chuck plate 32 to a supporting stand 31 with a holding fitting, a plug 45 at the lower end of a copper tube 34 is fitted to a fitting socket 47 against the push-up force of a push-up fitting 51 formed of a compression spring member 53. By unlocking the electrostatic chuck plate 32 from the supporting stand 31, the plug 45 of the copper tube 34 is pushed up by the push-up force of the push-up fitting 51 formed of the compression spring member 53 to move the copper tube 34 upward together with the electrostatic chuck plate 32. Thus, the electrostatic chuck plate 32 can be attached and detached to/from the electrostatic chuck supporting mechanism.;COPYRIGHT: (C)2004,JPO