ELECTRONIC BEAM CURRENT MEASURING TECHNOLOGY AND ELECTRONIC BEAM APPLICATION DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide an electronic beam current measuring technology that not only ensures the precision required for current measurement but also enables short-time current measurement and efficient current measurement in a variety of current measurement modes in electronic beam drawing systems.;SOLUTION: This technology prepares as reference data a list of measurement parameters that ensures the required precision and enables current measurement at the shortest time and uses this reference data to determine the measurement parameters (504) for efficient current measurement (506). In addition, the current values and variations of the respective beams measured in advanced are saved as log data so that they can be referenced to determine the measurement parameter correctly. Furthermore, a change in the beam current condition is checked from the log data to determine a bad beam (512). In this way, current measurement can be performed at the shortest time in a variety of measurement modes.;COPYRIGHT: (C)2007,JPO&INPIT