METHOD FOR MANUFACTURING ELECTRODE FOR GENERATING NORMAL PRESSURE PLASMA, ELECTRODE STRUCTURE AND NORMAL PRESSURE PLASMA GENERATING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrode for generating normal pressure plasma, capable of prolonging the lifetime of the electrode and reducing the cost for manufacturing the electrode, an electrode structure and a normal pressure plasma generating apparatus that uses this.;SOLUTION: A plasma electrode structure 300 includes a plate-type power supply electrode 311 and a grounded electrode 321 facing each other in parallel, vertically for supplying high-frequency power for plasma generation, where oxide coat layers 310 and 320 are formed uniformly over the entire surfaces of the power supply electrode 311 and the grounded electrode 321, and a space 330 for plasma generation is formed between the power supply electrode 311 and the grounded electrode 321.;COPYRIGHT: (C)2007,JPO&INPIT