THIN FILM CHARACTERISTIC EVALUATION METHOD, THIN FILM CHARACTERISTIC EVALUATION DEVICE, AND THIN FILM SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a thin film characteristic evaluation device for accurately evaluating characteristics of the surface state of a thin film, and to provide a thin film characteristic evaluation method.;SOLUTION: The thin film characteristic evaluation device comprises: a centroid calculation part for finding the centroid of a figure obtained by making a boundary of each crystal parallel to the surface of the thin film on the basis of information indicating positions of each vertex and the boundary of an adjacent crystal of a plurality of crystals on the surface of the thin film including the plurality of the crystals and being projected on a reference plane being a plane including the bottom face of the crystal; and a crystal inclination angle calculation part for calculating a crystal inclination angle being an angle making a vertical line being a vertical straight line on the reference plane by allowing a centroid-vertex straight line connecting the centroid and the vertex to include the centroid.;COPYRIGHT: (C)2007,JPO&INPIT