CHARACTERISTIC INSPECTION DEVICE, CHARACTERISTIC INSPECTION METHOD, AND CHARACTERISTIC INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To suppress deterioration in calculation accuracy of location of a probe card due to dislocating of a probe in the direction of a scrub.;SOLUTION: This device is provided with a location information calculating part 7 which calculates location of the probe card 5 based on an image pick-up result of the probe 6 by a camera 3 and calculates location of a pad electrode P based on an image pick-up result of the pad electrode P by a camera 4. The location information calculating part 7 calculates the location of the probe card 5 while ignoring the location of the probe 6 in the direction of the scrub.;COPYRIGHT: (C)2007,JPO&INPIT