Being manner in order to burble the burble manner

摘要

PROBLEM TO BE SOLVED: To excellently peel a resist film. ;SOLUTION: Ozon water from a nozzle for ozone water 13 is supplied to the principal plane of a base plate S in an entrance conveyor 1. Next, peeling liquid is sprayed on the principal plane of the base plate S from a spray for peeling liquid 23 in a peeling tank 2. Thereafter, the peeling liquid on the principal plane of the base plate S is washed out in a washing tank 3. Since the hardened part of the surface layer of the resist film is decomposed and softened by the ozone water, the peeling with the peeling liquid is efficiently performed.;COPYRIGHT: (C)1999,JPO