Being burble manner in order to burble the burble

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for peeling a masking tape, in each of which an applied coating material stuck onto the masking tape can be recovered without dropping the applied coating material on a substrate.;SOLUTION: The substrate 50 is placed on a stage. A supplying means supplies a peeling tape 41. A guiding means guides the peeling tape 41 supplied from the supplying means so that the adhesive surface of the peeling tape 41 is faced toward the direction of the masking tape 24. A moving means moves at least one of the stage and the guiding means relatively to the masking tape 24-stuck direction. The peeling tape 41 whose adhesive surface is faced toward the direction of the masking tape 24 is abutted/stuck successively on/to the masking tape 24 by the guiding means as at least one of the stage and the guiding means is moved relatively. A recovering means recovers the masking tape 24 stuck to the peeling tape 41 in the direction parted from the substrate together with the peeling tape 41.;COPYRIGHT: (C)2007,JPO&INPIT