首页>
外国专利>
The metal - semiconductor - metal by pad oxide layer (MSM) the system and the method of possessing the photodetector
The metal - semiconductor - metal by pad oxide layer (MSM) the system and the method of possessing the photodetector
展开▼
机译:金属-半导体-金属的垫氧化层(MSM)的系统和拥有光电探测器的方法。
展开▼
页面导航
摘要
著录项
相似文献
摘要
Described herein is an MSM photodetector device wherein a dielectric layer is positioned between the absorbing layer and the substrate layer in order to decrease the device capacitance and thereby increasing the photodetector bandwidth. The dielectric layer increases the photodetector efficiency and blocks slow moving carriers from the high field drift region. The dielectric layer may be an oxide layer formed by one of wet thermal oxidation of AlGaAs, ion implantation, or wafer bonding with subsequent substrate removal.
展开▼