Wet processing for nozzle and wet processing equipment

摘要

PROBLEM TO BE SOLVED: To enable a processing solution applied to the processed region of a work to be uniform in feed rate in the width direction of processing.;SOLUTION: A wet processing device is equipped with an inlet pipe 21 which introduces a processing solution 2, an exhaust pipe 22 which exhausts it, and a joint between the two pipes in face to face with a work W. The processing solution 2 is supplied from the opening 21b of the inlet pipe 21 toward the work W, a processing region 35 is formed between the opening 21a and the work W and filled up with the processing solution 2 to carry out wet processing, the waste solution 2 discharged from the processing region 35 is directed by the exhaust pipe 22 and discharged out, and the processing solution supplied to the work from the opening 21b of the inlet pipe 21 is set uniform in feed rate in the width direction of processing vertical to the direction of processing of the work.;COPYRIGHT: (C)2003,JPO