Wet processing for nozzle and wet processing equipment

摘要

PROBLEM TO BE SOLVED: To prevent break of an ultrasonic transducer in a condition where an area having no treating liquid is developed in a treating region in the course of wet treatment operation.;SOLUTION: A wet treatment nozzle 1 is provided with; an inlet opening 21b for supplying a treating liquid 2 for wet treatment of an object W to be treated to a surface W1 to be treated of the object W; an outlet opening 22b for discharging the waste treating liquid 2 after wet treatment from the surface W1; the ultrasonic transducer 48 for imparting ultrasonic vibration to the treating liquid 2 on the surface W1; and a vibrating part 46 which is in contact with the ultrasonic transducer 48. The vibrating part 46 is disposed at least at the side of the object W with respect to the ultrasonic transducer 48. Thickness T of the vibrating part 46 at the side of the object W and a wavelength λof the ultrasonic vibration at the vibrating part 46 establish a relation represented by a formula: T=(n±0.1).λ/2 (wherein n is an integer of not less than 2).;COPYRIGHT: (C)2003,JPO