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Method for designing interconnect for a new processing technology

机译:一种用于新处理技术的互连设计方法

摘要

A method is disclosed for determining a size of an interconnect between a first and a second conductor respectively in two layers of an integrated circuit while scaling from a reference processing technology to a predetermined processing technology. The method comprises selecting a set of design rules for the conductors based on the predetermined processing technology, determining a length of a first side of a rectangular cross sectional area of the interconnect based on the design rules and a scaling rule for scaling such a length from the reference processing technology to the predetermined processing technology, and determining a length of a second side of the cross sectional area of the interconnect for compensating an increase of a resistance of the interconnect due to the scaling from the reference processing technology to the predetermined processing technology.
机译:公开了一种方法,该方法用于确定集成电路的两层中的第一导体和第二导体之间的互连的尺寸,同时从参考处理技术缩放到预定处理技术。该方法包括基于预定的处理技术为导体选择一组设计规则,基于设计规则和用于从中缩放该长度的缩放规则来确定互连的矩形横截面的第一侧的长度。将参考处理技术转换为预定处理技术,并确定互连的横截面面积的第二边的长度,以补偿由于从参考处理技术到预定处理技术的缩放而导致的互连电阻的增加。

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