A kind of method and apparatus are described,For being directed at the first object with respect to the second object, such as being directed at nano-imprint stamp and semiconductor wafer. Method includes the following steps: providing the product at least one flexible structure stationary phase at this at least one point, first product is provided and attacks petite person's surface undulation label on it, detector is provided, there is surface undulation label to generate detector signal for interaction for measuring flexible structure, it is related to the interaction, identify with and helps the position of the flexible structure of detector signal, therefore the second article is marked relative to the first object of alignment and the second object needed for realizing between the first object of relative movement and the second object between surface undulation label andgenerating by surface undulation.
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