Strain-inducing film formation by liquid-phase epitaxial re-growth

摘要

A method to form a strain-inducing three-component epitaxial film is described. In an embodiment, a three-component epitaxial film comprises atoms from a parent film, charge-neutral lattice-substitution impurities and charge carrier dopant impurities. In one embodiment, the charge-neutral lattice-substitution impurities are smaller and present in greater concentration than the charge carrier dopant impurities.