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Method for producing nozzle substrate, method for producing droplet-discharging head, head for discharging droplets, and apparatus for discharging droplets
Method for producing nozzle substrate, method for producing droplet-discharging head, head for discharging droplets, and apparatus for discharging droplets
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机译:喷嘴基板的制造方法,液滴吐出头的制造方法,液滴吐出头以及液滴吐出装置
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摘要
The present invention includes a step of forming concave portions to be nozzle openings by an etching process on a substrate to be processed, a step of bonding a first support substrate to a surface of the concave-portion-formed process side, a step of subjecting the processed substrate to a thinning process from a surface of an opposite side of a surface bonded to the first support substrate so as to have a desired thickness, thereby opening an end of the concave portion, a step of bonding a second support substrate to a surface of the concave-portion-opened side, a step of separating the first support substrate from the processed substrate and bonding a third support substrate to the separated surface of the processed substrate, and a step of separating the second support substrate from the processed substrate.
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