METHOD FOR PRODUCING NOZZLE SUBSTRATE, METHOD FOR PRODUCING DROPLET-DISCHARGING HEAD, HEAD FOR DISCHARGING DROPLETS, AND APPARATUS FOR DISCHARGING DROPLETS

摘要

A method for producing a nozzle substrate, a method for producing a droplet-discharging head, a head for discharging droplets, and an apparatus for discharging droplets are provided to improve the productivity and the rate of products according to the materials by the easy handling. A method for producing nozzle substrate includes the steps of forming by the etching process concave units which are a plurality of nozzle holes to discharge a droplet on the processed substrate, coupling a first sustaining substrate(61) on the surface of the processing side of the processed substrate which has the concave units, opening the edge of the concave units by thinning processing the processed substrate according to the wanted thickness from the opposite side of the coupled surface of the first sustaining substrate, coupling a second sustaining substrate on the surface of the opened side of the concave units, peeling the first sustaining substrate from the processed substrate, and coupling a third substrate on the peeled surface, and peeling the second sustaining substrate from the processed substrate.